Meghali Bora, Ajay Giri Prakash Kottapalli, Jianmin Miao, Michael S Triantafyllou
文献索引:10.1038/am.2017.183
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Flexible, self-powered, miniaturized, ultrasensitive flow sensors are in high demand for human motion detection, myoelectric prosthesis, biomedical robots, and health-monitoring devices. This paper reports a biomimetic nanoelectromechanical system (NEMS) flow sensor featuring a PVDF nanofiber sensing membrane with a hydrogel infused, vertically aligned carbon nanotube (VACNT) bundle that mechanically interacts with the flow. The hydrogel-VACNT structure mimics the cupula structure in biological flow sensors and gives the NEMS flow sensor ultrahigh sensitivity via a material-induced drag force enhancement mechanism. Through hydrodynamic experimental flow characterization, this work investigates the contributions of the mechanical and structural properties of the hydrogel in offering a sensing performance superior to that of conventional sensors. The ultrahigh sensitivity of the developed sensor enabled the detection of minute flows generated during human motion and micro-droplet propagation. The novel fabrication strategies and combination of materials used in the biomimetic NEMS sensor fabrication may guide the development of several wearable, flexible, and self-powered nanosensors in the future.
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