The reaction of (haloalkyl)trialkoxysilanes with polyfluorinated alkoxides is carried out in a similar way. This reaction, however, is accompanied by some side-processes due to which the yield of (polyfluoroalkoxyalkyl)trialkoxysilanes does not exceed 20%. Besides, the products of transetherificcation and SiC bond cleavage are formed. The reaction of (polyfluoroorganoxyalkyl)trialkoxysilanes with triethanolamine leads to the corresponding 1-substituted silatranes, R F O(CH 2 ) n ...