Hybrid Metamaterial Absorber Platform for Sensing of CO2 Gas at Mid‐IR

Dihan Hasan; Chengkuo Lee

Index: 10.1002/advs.201700581

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Abstract

Application of two major classes of CO2 gas sensors, i.e., electrochemical and nondispersive infrared is predominantly impeded by the poor selectivity and large optical interaction length, respectively. Here, a novel “hybrid metamaterial” absorber platform is presented by integrating the state‐of‐the‐art complementary metal–oxide–semiconductor compatible metamaterial with a smart, gas‐selective‐trapping polymer for highly selective and miniaturized optical sensing of CO2 gas in the 5–8 µm mid‐IR spectral window. The sensor offers a minimum of 40 ppm detection limit at ambient temperature on a small footprint (20 µm by 20 µm), fast response time (≈2 min), and low hysteresis. As a proof‐of‐concept, net absorption enhancement of 0.0282%/ppm and wavelength shift of 0.5319 nm ppm−1 are reported. Furthermore, the gas‐ selective smart polymer is found to enable dual‐mode multiplexed sensing for crosschecking and validation of gas concentration on a single platform. Additionally, unique sensing characteristics as determined by the operating wavelength and bandwidth are demonstrated. Also, large differential response of the metamaterial absorber platform for all‐optical monitoring is explored. The results will pave the way for a physical understanding of metamaterial‐based sensing when integrated with the mid‐IR detector for readout and extending the mid‐IR functionalities of selective polymers for the detection of technologically relevant gases.