Interactions of nitric oxide with Si (111) and (100) at high temperatures

DR He, FW Smith

Index: Surface Science, , vol. 154, p. 347 - 356

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Citation Number: 16

Abstract

... Surface Science. ... The interactions of nitric oxide (NO) with the clean Si (111) and (100) surfaces have been studied at high temperatures (1220–1390°C) for NO ... P(NO) and high values of T s , the volatile products N 2 and SiO are formed, so that an active Si surface is maintained. ...