Optics Express 2012-01-02

Laser conditioning on HfO2 film monitored by calorimeter.

Liu Hao, Chen Songlin, Wei Yaowei, Zhang Zhe, Luo Jin, Zheng Nan, Ma Ping

Index: Opt. Express 20(1) , 698-705, (2012)

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Abstract

Conditioning effect on HfO2 single-layer film by quasi-cw laser was investigated. The conditioning process was monitored with laser calorimeter. Experimental results revealed that the HfO2 film absorption decreased as a function of the irradiation dose. Higher laser power accelerated the conditioning process. The conditioning effect could not be explained by water annihilation. AFM pictures of the film surface showed that the structural information in the conditioned region was different from the unconditioned region. Monitoring the in situ absorption, laser calorimeter is a promising tool to investigate the laser conditioning process.

Related Compounds

  • Hydrofluoric acid

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