Hexachlorodisilane
Suppliers
Names
[ CAS No. ]:
13465-77-5
[ Name ]:
Hexachlorodisilane
[Synonym ]:
1,1,1,2,2,2-Hexachlorodisilane
Hexachlorodisilane
Disilane, 1,1,1,2,2,2-hexachloro-
EINECS 236-704-1
MFCD00011599
trichloro(trichlorosilyl)silane
Chemical & Physical Properties
[ Density]:
1.6±0.1 g/cm3
[ Boiling Point ]:
144.5±9.0 °C at 760 mmHg
[ Melting Point ]:
<0ºC
[ Molecular Formula ]:
Cl6Si2
[ Molecular Weight ]:
268.889
[ Flash Point ]:
78°C
[ Exact Mass ]:
265.766968
[ LogP ]:
8.55
[ Vapour Pressure ]:
6.4±0.3 mmHg at 25°C
[ Index of Refraction ]:
1.489
[ Storage condition ]:
below 5° C
[ Stability ]:
Stable, but reacts violently with water. Moisture sensitive. May be shock sensitive. Incompatible with water, moisture, acids, strong bases, oxidizing agents, alcohols.
MSDS
Safety Information
[ Symbol ]:
GHS05
[ Signal Word ]:
Danger
[ Hazard Statements ]:
H314
[ Supplemental HS ]:
Reacts violently with water.
[ Precautionary Statements ]:
P280-P305 + P351 + P338-P310
[ Personal Protective Equipment ]:
Faceshields;full-face respirator (US);Gloves;Goggles;multi-purpose combination respirator cartridge (US);type ABEK (EN14387) respirator filter
[ Hazard Codes ]:
C
[ Risk Phrases ]:
14-34
[ Safety Phrases ]:
S26-S36/37/39-S45
[ RIDADR ]:
UN 2987 8/PG 2
[ WGK Germany ]:
3
[ Packaging Group ]:
II
[ Hazard Class ]:
8
Synthetic Route
Articles
J. Chromatogr. A. 903(1) , 183-191, (2000)
Carbon isotopic compositions of aetio I occurring in the form of free-base, nickel, demetallation, dihydroxysilicon(IV) and bis(tert.-butyldimethylsiloxy)silicon(IV) [(tBDMSO)2Si(IV)] have shown that ...
Chemical vapor deposition of silicon films using hexachlorodisilane Taylor, R. C., Scott, B. A., Lin, S. T., LeGoues, F., & Tsang, J. C.MRS Proceedings 77 , 709, (1986)
Hexachlorodisilane as a Precursor in the LPCVD of Silicon Dioxide and Silicon Oxynitride Films. Taylor, R. C., & Scott, B. A.
J. Electrochem. Soc. 136(8) , 2382-2386, (1989)