Abstract Hexafluorobenzene reacts readily with a variety of trimethylsilyl ethers ROSiMe 3 (R= CF 3 CH 2, FCH 2 CH 2, H (CF 2) n, CH 2 (n= 2, 4), CF 3 (CF 2) 6 CH 2, CF 3 (CF 2) 5 CH 2 CH 2, Me 3 SiOCH 2 CH 2, C 6 F 5 OCH 2 CH 2, C 6 H 5, 4-FC 6 H 4) to give from mono-to hexapolyfluoroalkoxy-and polyfluoroaryloxy-benzenes. The structure of C 6 (OCH 2 CF 3) 6 has been confirmed by single-crystal X-ray analysis. The perfluorinated ether C 6 ...