Tetrakis(ethylmethylamino)zirconium(IV)

Modify Date: 2024-01-04 09:39:30

Tetrakis(ethylmethylamino)zirconium(IV) Structure
Tetrakis(ethylmethylamino)zirconium(IV) structure
Common Name Tetrakis(ethylmethylamino)zirconium(IV)
CAS Number 175923-04-3 Molecular Weight 323.63300
Density 1.049 g/mL at 25ºC(lit.) Boiling Point 81ºC0.1 mm Hg(lit.)
Molecular Formula C12H32N4Zr Melting Point N/A
MSDS Chinese USA Flash Point 50
Symbol GHS02 GHS07
GHS02, GHS07
Signal Word Danger

 Names

Name tetrakis(ethylmethylamino)zirconium
Synonym More Synonyms

 Chemical & Physical Properties

Density 1.049 g/mL at 25ºC(lit.)
Boiling Point 81ºC0.1 mm Hg(lit.)
Molecular Formula C12H32N4Zr
Molecular Weight 323.63300
Flash Point 50
Exact Mass 322.16700
PSA 12.96000
LogP 1.60960

 MSDS


Section 1: Product Identification
Tetrakis(ethylmethylamino)zirconium(IV), 99% TEMAZ, 40-1710, contained in 50 ml Swagelok® cylinder
Chemical Name:
(96-1070) for CVD/ALD
CAS Registry Number:175923-04-3
Formula:Zr[N(CH3)(CH2CH3)]4
EINECS Number:none
Chemical Family:metal amide complex
Synonym:Zirconium(IV) ethylmethylamide; Zirconium-tetrakis-ethylmethylamide

Section 2: Composition and Information on Ingredients
IngredientCAS NumberPercentACGIH (TWA)OSHA (PEL)
Title compound175923-04-3100%5mg/m3 (as Zr)5mg/m3 (as Zr)

Section 3: Hazards Identification
Emergency Overview:Material is extremely irritating to skin, eyes and respiratory tract.
Primary Routes of Exposure:Ingestion, inhalation of dust and vapor
Eye Contact:Causes severe irritation to the eyes.
Skin Contact:Causes severe irritation to the skin.
Inhalation:Causes irritation to the nose, mucous membranes and respiratory tract.
Ingestion may lead to burning sensation, dizziness, abdominal cramps, vomiting, bloody diarrhea, weakness
Ingestion:
and convulsions.
Acute Health Affects:Causes severe irritation to the skin, eyes and respiratory tract. May be harmful if swallowed or inhaled.
No information on long-term chronic effects. Repeated or prolonged exposure of the skin may cause
Chronic Health Affects:
dermatitis.
NTP:No
IARC:No
OSHA:No

SECTION 4: First Aid Measures
Immediately flush the eyes with copious amounts of water for at least 10-15 minutes. A victim may need
Eye Exposure:
assistance in keeping their eye lids open. Get immediate medical attention.
Wash the affected area with water. Remove contaminated clothes if necessary. Seek medical assistance if
Skin Exposure:
irritation persists.
Remove the victim to fresh air. Closely monitor the victim for signs of respiratory problems, such as difficulty
Inhalation:
in breathing, coughing, wheezing, or pain. In such cases seek immediate medical assistance.
Seek medical attention immediately. Keep the victim calm. Give the victim water (only if conscious). Induce
Ingestion:
vomiting only if directed by medical personnel.

SECTION 5: Fire Fighting Measures
Flash Point:no data
Autoignition Temperature:no data
Explosion Limits:no data
Extinguishing Medium:carbon dioxide, foam or dry powder
If this product is involved in a fire, fire fighters should be equipped with a NIOSH approved positive pressure
Special Fire Fighting Procedures:
self-contained breathing apparatus and full protective clothing.
Hazardous Combustion andIf involved in a fire, this material may emit toxic and corrosive fumes.
Decomposion Products:
Unusual Fire or Explosion Hazards: Highly flammable. Releases flammable gas in contact with water.

SECTION 6: Accidental Release Measures
Eliminate all ignition sources and ensure adequate ventilation. Small spills can be mixed with vermiculite,
Spill and Leak Procedures:
sodium carbonate or other suitable non-combustible adsorbent and swept up.

SECTION 7: Handling and Storage
Store the material in a tightly sealed container under an inert atmosphere of nitrogen or argon. Keep away
Handling and Storage:
from heat and direct sunlight.

SECTION 8: Exposure Controls and Personal Protection
Eye Protection:Always wear approved safety glasses when handling a chemical substance in the laboratory.
Skin Protection:Wear protective clothing and gloves.
Ventilation:Handle the material in an efficient fume hood.
If ventilation is not available a respirator should be worn. The use of respirators requires a Respirator
Respirator:
Protection Program to be in compliance with 29 CFR 1910.134.
Ventilation:Handle the material in an efficient fume hood.
Additional Protection:No additional protection required.

SECTION 9: Physical and Chemical Properties
Color and Form:light yellow liq.
Molecular Weight:323.63
Melting Point:not applicable
Boiling Point:81°C /0.1mm
Vapor Pressure:no data
Specific Gravity:1.049
Odor:slight amine odor
Solubility in Water:reacts with water

SECTION 10: Stability and Reactivity
Stability:moisture sensitive
Hazardous Polymerization:no hazardous polymerization
Conditions to Avoid:contact with water
Incompatibility:Water, mineral acids, halogens and oxidizing agents
Decomposition Products:Carbon dioxide, carbon monoxide, organic fumes and zirconium oxide.

SECTION 11: Toxicological Information
RTECS Data:No information available from the RTECS files.
Carcinogenic Effects:no data
Mutagenic Effects:no data
Tetratogenic Effects:no data

SECTION 12: Ecological Information
Ecological Information:No information available.

SECTION 13: Disposal Considerations
Disposal:Dispose of this material according to local, state and federal regulations.

SECTION 14: Transportation
Shipping Name (CFR):Organometallic substance, Liquid, Water-reactive,Flammable
Hazard Class (CFR):4.3
Additional Hazard Class (CFR):3
Packaging Group (CFR):II
UN ID Number (CFR):UN# 3399
Shipping Name (IATA):Organometallic substance, Liquid,Water-reactive,Flammable
Hazard Class (IATA):4.3
Additional Hazard Class (IATA):3
Packaging Group (IATA):II
UN ID Number (IATA):UN# 3399

SECTION 15: Regulatory Information
TSCA:Not listed in the TSCA inventory
SARA (Title 313):Title compound not listed
Second Ingredient:none


SECTION 16 - ADDITIONAL INFORMATION
N/A

 Safety Information

Symbol GHS02 GHS07
GHS02, GHS07
Signal Word Danger
Hazard Statements H225-H261-H315-H319-H335
Precautionary Statements P210-P231 + P232-P261-P305 + P351 + P338-P422
Personal Protective Equipment Eyeshields;Faceshields;full-face respirator (US);Gloves;multi-purpose combination respirator cartridge (US);type ABEK (EN14387) respirator filter
Hazard Codes F,Xi
Risk Phrases R11
Safety Phrases S16
RIDADR UN 3398 4.3/PG 2
WGK Germany 3
Packaging Group II
Hazard Class 4.3

 Articles1

More Articles
Won, S-J.; Kim, J-Y.; Choi, G-J.; Heo, J.; Hwang, C. S.; Kim, H.

J. Mater. Chem. 21 , 4374, (2009)

 Synonyms

TEMAZ (Tetrakis(ethylmethylamino)zirconium(IV)
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