Tetrakis(dimethylamido)hafnium
Suppliers
Names
Chemical & Physical Properties
[ Density]:
1.098 g/mL at 25 °C
[ Boiling Point ]:
6.1ºC at 760 mmHg
[ Melting Point ]:
26-29ºC(lit.)
[ Molecular Formula ]:
C8H24HfN4
[ Molecular Weight ]:
354.79300
[ Flash Point ]:
109 °F
[ Exact Mass ]:
356.14700
[ PSA ]:
12.96000
[ LogP ]:
0.04920
[ Appearance of Characters ]:
crystal | colorless to pale yellow
MSDS
Safety Information
[ Symbol ]:
GHS02, GHS05
[ Signal Word ]:
Danger
[ Hazard Statements ]:
H228-H261-H314
[ Supplemental HS ]:
Reacts violently with water.
[ Precautionary Statements ]:
P210-P231 + P232-P280-P305 + P351 + P338-P370 + P378-P402 + P404
[ Personal Protective Equipment ]:
Eyeshields;Faceshields;full-face particle respirator type N100 (US);Gloves;respirator cartridge type N100 (US);type P1 (EN143) respirator filter;type P3 (EN 143) respirator cartridges
[ Hazard Codes ]:
F: Flammable;C: Corrosive;
[ Risk Phrases ]:
R11
[ Safety Phrases ]:
6-26-36/37/39-43-45
[ RIDADR ]:
UN 3396 4
[ WGK Germany ]:
3
Articles
Appl. Phys. Lett. 91 , 193503, (2007)
Surface morphology and crystallinity control in the atomic layer deposition (ALD) of hafnium and zirconium oxide thin films Hausmann DM, Gordon RG
J. Cryst. Growth 249 , 251-261, (2003)
The Savannah ALD System - An Excellent Tool for Atomic Layer Deposition Monsma D, Becker J
Material Matters 1(3) , 5, (2006)