175923-04-3

• 常用中文名：四(乙基甲基氨基)锆(IV)
• 常用英文名：Tetrakis(ethylmethylamino)zirconium(IV)
• CAS号：175923-04-3
• 分子式：C₁₂H₃₂N₄Zr
• 分子量：323.63300
• 相关类别： 有机原料 有机金属类化合物 有机锆
• 发布时间：2018-05-29 08:00:00
• 更新时间：2024-01-04 09:39:30
• 下载msds

名称

• 中文名: 四(乙基甲基胺基)锆(IV)
• 英文名: tetrakis(ethylmethylamino)zirconium
• 中文别名: 四(乙基甲基氨基)锆(IV)
• 英文别名: TEMAZ (Tetrakis(ethylmethylamino)zirconium(IV)

物化性质

• 密度: 1.049 g/mL at 25ºC(lit.)
• 沸点: 81ºC0.1 mm Hg(lit.)
• 分子式: C₁₂H₃₂N₄Zr
• 分子量: 323.63300
• 闪点: 50
• 精确质量: 322.16700
• PSA: 12.96000
• LogP: 1.60960
• 外观性状: 液体
• 储存条件:

  保存方法：密闭，阴凉，通风干燥处

• 稳定性:

  避氧化物、水分

• 更多:

  1. 性状：液体

  2. 密度（g/mL, 20 ℃ ）：1.049

  3. 相对蒸汽密度（g/mL,空气=1）：未确定

  4. 熔点（ºC）：未确定

  5. 沸点（ºC,常压）：未确定

  6. 沸点（ºC0.1 mmHg）：81

  7. 折射率：未确定

  8. 闪点（ºF）：50

  9. 比旋光度（º）：未确定

  10. 自燃点或引燃温度（ºC）：10 11. 蒸气压（kPa,25ºC）：未确定

  12. 饱和蒸气压（kPa,60ºC）：未确定

  13. 燃烧热（KJ/mol）：未确定

  14. 临界温度（ºC）：未确定

  15. 临界压力（KPa）：未确定

  16. 油水（辛醇/水）分配系数的对数值：未确定

  17. 爆炸上限（%,V/V）：未确定

  18. 爆炸下限（%,V/V）：未确定

  19. 溶解性：与水强烈反应

MSDS

Section 1: Product Identification Tetrakis(ethylmethylamino)zirconium(IV), 99% TEMAZ, 40-1710, contained in 50 ml Swagelok® cylinder Chemical Name: (96-1070) for CVD/ALD CAS Registry Number:175923-04-3 Formula:Zr[N(CH3)(CH2CH3)]4 EINECS Number:none Chemical Family:metal amide complex Synonym:Zirconium(IV) ethylmethylamide; Zirconium-tetrakis-ethylmethylamide Section 2: Composition and Information on Ingredients IngredientCAS NumberPercentACGIH (TWA)OSHA (PEL) Title compound175923-04-3100%5mg/m3 (as Zr)5mg/m3 (as Zr) Section 3: Hazards Identification Emergency Overview:Material is extremely irritating to skin, eyes and respiratory tract. Primary Routes of Exposure:Ingestion, inhalation of dust and vapor Eye Contact:Causes severe irritation to the eyes. Skin Contact:Causes severe irritation to the skin. Inhalation:Causes irritation to the nose, mucous membranes and respiratory tract. Ingestion may lead to burning sensation, dizziness, abdominal cramps, vomiting, bloody diarrhea, weakness Ingestion: and convulsions. Acute Health Affects:Causes severe irritation to the skin, eyes and respiratory tract. May be harmful if swallowed or inhaled. No information on long-term chronic effects. Repeated or prolonged exposure of the skin may cause Chronic Health Affects: dermatitis. NTP:No IARC:No OSHA:No SECTION 4: First Aid Measures Immediately flush the eyes with copious amounts of water for at least 10-15 minutes. A victim may need Eye Exposure: assistance in keeping their eye lids open. Get immediate medical attention. Wash the affected area with water. Remove contaminated clothes if necessary. Seek medical assistance if Skin Exposure: irritation persists. Remove the victim to fresh air. Closely monitor the victim for signs of respiratory problems, such as difficulty Inhalation: in breathing, coughing, wheezing, or pain. In such cases seek immediate medical assistance. Seek medical attention immediately. Keep the victim calm. Give the victim water (only if conscious). Induce Ingestion: vomiting only if directed by medical personnel. SECTION 5: Fire Fighting Measures Flash Point:no data Autoignition Temperature:no data Explosion Limits:no data Extinguishing Medium:carbon dioxide, foam or dry powder If this product is involved in a fire, fire fighters should be equipped with a NIOSH approved positive pressure Special Fire Fighting Procedures: self-contained breathing apparatus and full protective clothing. Hazardous Combustion andIf involved in a fire, this material may emit toxic and corrosive fumes. Decomposion Products: Unusual Fire or Explosion Hazards: Highly flammable. Releases flammable gas in contact with water. SECTION 6: Accidental Release Measures Eliminate all ignition sources and ensure adequate ventilation. Small spills can be mixed with vermiculite, Spill and Leak Procedures: sodium carbonate or other suitable non-combustible adsorbent and swept up. SECTION 7: Handling and Storage Store the material in a tightly sealed container under an inert atmosphere of nitrogen or argon. Keep away Handling and Storage: from heat and direct sunlight. SECTION 8: Exposure Controls and Personal Protection Eye Protection:Always wear approved safety glasses when handling a chemical substance in the laboratory. Skin Protection:Wear protective clothing and gloves. Ventilation:Handle the material in an efficient fume hood. If ventilation is not available a respirator should be worn. The use of respirators requires a Respirator Respirator: Protection Program to be in compliance with 29 CFR 1910.134. Ventilation:Handle the material in an efficient fume hood. Additional Protection:No additional protection required. SECTION 9: Physical and Chemical Properties Color and Form:light yellow liq. Molecular Weight:323.63 Melting Point:not applicable Boiling Point:81°C /0.1mm Vapor Pressure:no data Specific Gravity:1.049 Odor:slight amine odor Solubility in Water:reacts with water SECTION 10: Stability and Reactivity Stability:moisture sensitive Hazardous Polymerization:no hazardous polymerization Conditions to Avoid:contact with water Incompatibility:Water, mineral acids, halogens and oxidizing agents Decomposition Products:Carbon dioxide, carbon monoxide, organic fumes and zirconium oxide. SECTION 11: Toxicological Information RTECS Data:No information available from the RTECS files. Carcinogenic Effects:no data Mutagenic Effects:no data Tetratogenic Effects:no data SECTION 12: Ecological Information Ecological Information:No information available. SECTION 13: Disposal Considerations Disposal:Dispose of this material according to local, state and federal regulations. SECTION 14: Transportation Shipping Name (CFR):Organometallic substance, Liquid, Water-reactive,Flammable Hazard Class (CFR):4.3 Additional Hazard Class (CFR):3 Packaging Group (CFR):II UN ID Number (CFR):UN# 3399 Shipping Name (IATA):Organometallic substance, Liquid,Water-reactive,Flammable Hazard Class (IATA):4.3 Additional Hazard Class (IATA):3 Packaging Group (IATA):II UN ID Number (IATA):UN# 3399 SECTION 15: Regulatory Information TSCA:Not listed in the TSCA inventory SARA (Title 313):Title compound not listed Second Ingredient:none SECTION 16 - ADDITIONAL INFORMATION N/A

毒性和生态

生态学数据: 1、其它有害作用：通常对水是稍微危害的，若无政府许可，勿将材料排入周围环境。

安全

• 符号: GHS02, GHS07
• 信号词: Danger
• 危害声明: H225-H261-H315-H319-H335
• 警示性声明: P210-P231 + P232-P261-P305 + P351 + P338-P422
• 个人防护装备: Eyeshields;Faceshields;full-face respirator (US);Gloves;multi-purpose combination respirator cartridge (US);type ABEK (EN14387) respirator filter
• 危害码 (欧洲): F,Xi
• 风险声明 (欧洲): R11
• 安全声明 (欧洲): S16
• 危险品运输编码: UN 3398 4.3/PG 2
• WGK德国: 3
• 包装等级: II
• 危险类别: 4.3