Methyltrichlorosilane

Modify Date: 2026-06-30 20:47:46

Methyltrichlorosilane Structure
Methyltrichlorosilane structure
Common Name Methyltrichlorosilane
CAS Number 75-79-6 Molecular Weight 149.479
Density 1.3±0.1 g/cm3 Boiling Point 73.5±3.0 °C at 760 mmHg
Molecular Formula CH3Cl3Si Melting Point -77 °C
MSDS Chinese USA Flash Point -15.0±0.0 °C
Symbol GHS02 GHS05 GHS06
GHS02, GHS05, GHS06
Signal Word Danger

 Names

This table lists Chinese names, IUPAC names and various aliases of this chemical substance.

Name Methyltrichlorosilane
Synonym More Synonyms

 Chemical & Physical Properties

This table shows physicochemical parameters including melting point, boiling point, density, solubility and optical rotation. Missing data is marked as N/A.

Density 1.3±0.1 g/cm3
Boiling Point 73.5±3.0 °C at 760 mmHg
Melting Point -77 °C
Molecular Formula CH3Cl3Si
Molecular Weight 149.479
Flash Point -15.0±0.0 °C
Exact Mass 147.906952
LogP 4.19
Vapour density 5.2 (vs air)
Vapour Pressure 124.5±0.1 mmHg at 25°C
Index of Refraction 1.434
InChIKey JLUFWMXJHAVVNN-UHFFFAOYSA-N
SMILES C[Si](Cl)(Cl)Cl
Stability Stable, but reacts violently with water. Highly flammable. Incompatible with moisture, water, strong bases, strong acids, strong oxidizing agents.
Water Solubility REACTS
Freezing Point -77.8℃

 MSDS

This table provides MSDS information including hazard classification, first‑aid, fire‑fighting, spill handling, operation and storage instructions.

 Toxicological Information

This table summarizes toxicological test data, acute & chronic toxicity and ecological hazard parameters for this chemical.

CHEMICAL IDENTIFICATION

RTECS NUMBER :
VV4550000
CHEMICAL NAME :
Silane, methyltrichloro-
CAS REGISTRY NUMBER :
75-79-6
BEILSTEIN REFERENCE NO. :
1361381
LAST UPDATED :
199701
DATA ITEMS CITED :
10
MOLECULAR FORMULA :
C-H3-Cl3-Si
MOLECULAR WEIGHT :
149.48
WISWESSER LINE NOTATION :
G-SI-GG1

HEALTH HAZARD DATA

ACUTE TOXICITY DATA

TYPE OF TEST :
Standard Draize test
ROUTE OF EXPOSURE :
Administration onto the skin
SPECIES OBSERVED :
Rodent - rabbit
REFERENCE :
ATDAEI Acute Toxicity Data. Journal of the American College of Toxicology, Part B. (Mary Ann Liebert, Inc., 1651 Third Ave., New York, NY 10128) V.1- 1990- Volume(issue)/page/year: 12,571,1993
TYPE OF TEST :
Standard Draize test
ROUTE OF EXPOSURE :
Administration into the eye
SPECIES OBSERVED :
Rodent - rabbit
REFERENCE :
85JCAE "Prehled Prumyslove Toxikologie; Organicke Latky," Marhold, J., Prague, Czechoslovakia, Avicenum, 1986 Volume(issue)/page/year: -,1219,1986 ** ACUTE TOXICITY DATA **
TYPE OF TEST :
LD50 - Lethal dose, 50 percent kill
ROUTE OF EXPOSURE :
Oral
SPECIES OBSERVED :
Rodent - rat
DOSE/DURATION :
1620 uL/kg
TOXIC EFFECTS :
Lungs, Thorax, or Respiration - dyspnea Gastrointestinal - hypermotility, diarrhea Gastrointestinal - other changes
REFERENCE :
ATDAEI Acute Toxicity Data. Journal of the American College of Toxicology, Part B. (Mary Ann Liebert, Inc., 1651 Third Ave., New York, NY 10128) V.1- 1990- Volume(issue)/page/year: 12,571,1993
TYPE OF TEST :
LC50 - Lethal concentration, 50 percent kill
ROUTE OF EXPOSURE :
Inhalation
SPECIES OBSERVED :
Rodent - rat
DOSE/DURATION :
450 ppm/4H
TOXIC EFFECTS :
Details of toxic effects not reported other than lethal dose value
REFERENCE :
85JCAE "Prehled Prumyslove Toxikologie; Organicke Latky," Marhold, J., Prague, Czechoslovakia, Avicenum, 1986 Volume(issue)/page/year: -,1219,1986
TYPE OF TEST :
LDLo - Lowest published lethal dose
ROUTE OF EXPOSURE :
Intraperitoneal
SPECIES OBSERVED :
Rodent - rat
DOSE/DURATION :
30 mg/kg
TOXIC EFFECTS :
Details of toxic effects not reported other than lethal dose value
REFERENCE :
JIHTAB Journal of Industrial Hygiene and Toxicology. (Cambridge, MA) V.18-31, 1936-49. For publisher information, see AEHLAU. Volume(issue)/page/year: 30,332,1948
TYPE OF TEST :
LC50 - Lethal concentration, 50 percent kill
ROUTE OF EXPOSURE :
Inhalation
SPECIES OBSERVED :
Rodent - mouse
DOSE/DURATION :
180 mg/m3/2H
TOXIC EFFECTS :
Details of toxic effects not reported other than lethal dose value
REFERENCE :
TPKVAL Toksikologiya Novykh Promyshlennykh Khimicheskikh Veshchestv. Toxicology of New Industrial Chemical Substances. For English translation, see TNICS*. (Izdatel'stvo Meditsina, Moscow, USSR) No.1- 1961- Volume(issue)/page/year: 3,23,1961
TYPE OF TEST :
LD50 - Lethal dose, 50 percent kill
ROUTE OF EXPOSURE :
Administration onto the skin
SPECIES OBSERVED :
Rodent - rabbit
DOSE/DURATION :
840 uL/kg
TOXIC EFFECTS :
Behavioral - altered sleep time (including change in righting reflex) Liver - other changes Nutritional and Gross Metabolic - weight loss or decreased weight gain
REFERENCE :
ATDAEI Acute Toxicity Data. Journal of the American College of Toxicology, Part B. (Mary Ann Liebert, Inc., 1651 Third Ave., New York, NY 10128) V.1- 1990- Volume(issue)/page/year: 12,571,1993 *** NIOSH STANDARDS DEVELOPMENT AND SURVEILLANCE DATA *** NIOSH OCCUPATIONAL EXPOSURE SURVEY DATA : NOHS - National Occupational Hazard Survey (1974) NOHS Hazard Code - 83302 No. of Facilities: 10 (estimated) No. of Industries: 1 No. of Occupations: 1 No. of Employees: 60 (estimated) NOES - National Occupational Exposure Survey (1983) NOES Hazard Code - 83302 No. of Facilities: 63 (estimated) No. of Industries: 2 No. of Occupations: 6 No. of Employees: 1755 (estimated) No. of Female Employees: 1191 (estimated)

 Safety Information

This table covers safety warnings, protective measures, incompatible substances and disposal guidelines for this compound.

Symbol GHS02 GHS05 GHS06
GHS02, GHS05, GHS06
Signal Word Danger
Hazard Statements H225-H302 + H312-H314-H331
Supplemental HS Corrosive to the respiratory tract., Reacts violently with water.
Precautionary Statements P210-P261-P280-P303 + P361 + P353-P305 + P351 + P338-P370 + P378
Personal Protective Equipment Faceshields;full-face respirator (US);Gloves;Goggles;multi-purpose combination respirator cartridge (US);type ABEK (EN14387) respirator filter
Hazard Codes F:Flammable
Risk Phrases R11;R14;R36/37/38
Safety Phrases S26-S39
RIDADR UN 1250 3/PG 1
WGK Germany 1
RTECS VV4550000
Packaging Group I
Hazard Class 3
HS Code 29310095

 Synthetic Route

This table presents publicly reported synthetic routes, reaction conditions, reactants and product information of the compound.

 Customs

This table shows customs‑related data including HS‑code, tariff and regulatory conditions for import and export.

HS Code 29310095

 Articles9

More Articles

This table lists relevant public references with title, journal and publication metadata for this compound.

Enzyme electrode for the measurement of lactate in undiluted blood.

Clin. Chim. Acta 157(2) , 191-8, (1986)

An enzyme electrode is described based upon the enzyme lactate oxidase (EC 1.1.3.2) coupled to an H2O2 sensor. Use of an organosilane-treated microporous membrane over the enzyme layer, allows respons...

Theoretical study of the pyrolysis of methyltrichlorosilane in the gas phase. 3. Reaction rate constant calculations.

J. Phys. Chem. A 114(6) , 2384-92, (2010)

The rate constants for the gas-phase reactions in the silicon carbide chemical vapor deposition of methyltrichlorosilane (Ge, Y. B.; Gordon, M. S.; Battaglia, F.; Fox, R. O. J. Phys. Chem. A 2007, 111...

Theoretical study of the pyrolysis of methyltrichlorosilane in the gas phase. 2. Reaction paths and transition states.

J. Phys. Chem. A 111(8) , 1475-86, (2007)

The kinetics for the previously proposed 114-reaction mechanism for the chemical vapor deposition (CVD) process that leads from methyltrichlorosilane (MTS) to silicon carbide (SiC) are examined. Among...

 Synonyms

This table collects all English aliases, systematic names and CAS‑related synonyms of the compound.

Methylsilicochloroform
methyl trichlorosilane
Trichloro(methyl)silane
SiCH3Cl3
methyltrichloromonosilane
Methyltrichlosilane
Luperox 118
UNII-UIR5I18638
Methylsilichloroform
Methylsilyl trichloride
EINECS 200-902-6
CM9000
methyl-trichlorsilan
MFCD00000481
Methyltrichlorosilane
Trichloromethylsilane
Perhexa 25Z
Trichlor-methylsilan
Kayaester AB
CH3SiCl3

 Methyltrichlorosilane | FAQ

This section contains frequently‑asked‑questions about this compound, including basic parameters, properties, storage conditions and corresponding answers.

Q: What is the SMILES notation of Methyltrichlorosilane?
A: SMILES notation of Methyltrichlorosilane is C[Si](Cl)(Cl)Cl.
Q: What is the InChIKey of Methyltrichlorosilane?
A: InChIKey of Methyltrichlorosilane is JLUFWMXJHAVVNN-UHFFFAOYSA-N.
Q: What is the LogP of Methyltrichlorosilane?
A: LogP of Methyltrichlorosilane is 4.19.
Q: How is the water solubility of Methyltrichlorosilane?
A: Water solubility of Methyltrichlorosilane: REACTS.
Q: What English synonyms does Methyltrichlorosilane have?
A: English synonyms of Methyltrichlorosilane: Methylsilicochloroform, methyl trichlorosilane, Trichloro(methyl)silane, SiCH3Cl3, methyltrichloromonosilane, Methyltrichlosilane, Luperox 118, UNII-UIR5I18638, Methylsilichloroform, Methylsilyl trichloride, EINECS 200-902-6, CM9000, methyl-trichlorsilan, MFCD00000481, Methyltrichlorosilane, Trichloromethylsilane, Perhexa 25Z, Trichlor-methylsilan, Kayaester AB, CH3SiCl3.
Q: What are the upstream materials of Methyltrichlorosilane?
A: Related upstream materials(CAS) of Methyltrichlorosilane: 1185-55-3;2031-67-6;7440-21-3;74-87-3;75-54-7;107-05-1;10026-04-7;75-24-1;74-88-4;56-23-5.
Q: What is the boiling point of Methyltrichlorosilane?
A: Boiling point of Methyltrichlorosilane is 73.5±3.0 °C at 760 mmHg.
Q: What are the downstream products of Methyltrichlorosilane?
A: Related downstream products(CAS) of Methyltrichlorosilane: 104745-21-3;111268-10-1;10584-95-9;373-74-0;420-58-6;3768-57-8;5581-66-8;5578-42-7;1825-75-8.
Q: What is the safety information for Methyltrichlorosilane?
A: Safety information for Methyltrichlorosilane: S26-S39.
Q: What is the CAS number of Methyltrichlorosilane?
A: CAS number of Methyltrichlorosilane is 75-79-6.

 Methyltrichlorosilanefactory

This table lists manufacturers and suppliers of this compound, including vendor names and product supply reference information.

Shanghai Nianxing Industrial Co., Ltd
Dayang Chem (Hangzhou) Co., Ltd.
Henan Tianfu Chemical Co., Ltd.
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