二氯硅烷

【用途一】
用于电子工业中多晶硅外延生长以及化学气相淀积二氧化硅和氮化硅
【用途二】
用于半导体制造中，尤其是外延法工艺作为硅源。

[ 密度 ]:
1,22 g/cm3

[ 沸点 ]:
8.3 °C(lit.)

[ 熔点 ]:
−122 °C(lit.)

[ 分子式 ]:
Cl₂H₂Si

[ 分子量 ]:
101.00700

[ 闪点 ]:
-37°C

[ 精确质量 ]:
99.93030

[ LogP ]:
0.46280

[ 外观性状 ]:
无色气体

[ 蒸汽密度 ]:
3.5 (vs air)

[ 蒸汽压 ]:
1254 mm Hg ( 20 °C)

[ 稳定性 ]:
Stable. Extremely flammable; note very wide explosion limits. Reacts violently with water, alcohols, strong oxidizing agents, bases.

[ 水溶解性 ]:
decomposes

详细MSDS(安全技术说明书)

CHEMICAL IDENTIFICATION

RTECS NUMBER :

VV3050000

CHEMICAL NAME :

Silane, dichloro-

CAS REGISTRY NUMBER :

4109-96-0

LAST UPDATED :

199712

DATA ITEMS CITED :

6

MOLECULAR FORMULA :

Cl2-H2-Si

HEALTH HAZARD DATA

ACUTE TOXICITY DATA

TYPE OF TEST :

LC50 - Lethal concentration, 50 percent kill

ROUTE OF EXPOSURE :

Inhalation

SPECIES OBSERVED :

Rodent - rat

DOSE/DURATION :

215 ppm

TOXIC EFFECTS :

Sense Organs and Special Senses (Eye) - lacrimation Lungs, Thorax, or Respiration - acute pulmonary edema Lungs, Thorax, or Respiration - dyspnea

REFERENCE :

JTSCDR Journal of Toxicological Sciences. (Japanese Soc. of Toxicological Sciences, 4th Floor, Gakkai Center Bldg., 4-16, Yayoi 2-chome, Bunkyo-ku, Tokyo 113, Japan) V.1- 1976- Volume(issue)/page/year: 18,394,1993

TYPE OF TEST :

LC50 - Lethal concentration, 50 percent kill

ROUTE OF EXPOSURE :

Inhalation

SPECIES OBSERVED :

Rodent - mouse

DOSE/DURATION :

144 ppm/4H

TOXIC EFFECTS :

Details of toxic effects not reported other than lethal dose value

REFERENCE :

ARTODN Archives of Toxicology. (Springer-Verlag, Heidelberger Pl. 3, D-1000 Berlin 33, Fed. Rep. Ger.) V.32- 1974- Volume(issue)/page/year: 70,218,1996 ** OTHER MULTIPLE DOSE TOXICITY DATA **

TYPE OF TEST :

TCLo - Lowest published toxic concentration

ROUTE OF EXPOSURE :

Inhalation

SPECIES OBSERVED :

Rodent - mouse

DOSE/DURATION :

32 ppm/6H/4W-I

TOXIC EFFECTS :

Sense Organs and Special Senses (Olfaction) - effect, not otherwise specified Liver - changes in liver weight Nutritional and Gross Metabolic - weight loss or decreased weight gain

REFERENCE :

ARTODN Archives of Toxicology. (Springer-Verlag, Heidelberger Pl. 3, D-1000 Berlin 33, Fed. Rep. Ger.) V.32- 1974- Volume(issue)/page/year: 70,218,1996 *** NIOSH STANDARDS DEVELOPMENT AND SURVEILLANCE DATA *** NIOSH OCCUPATIONAL EXPOSURE SURVEY DATA : NOES - National Occupational Exposure Survey (1983) NOES Hazard Code - X3138 No. of Facilities: 33 (estimated) No. of Industries: 5 No. of Occupations: 13 No. of Employees: 5098 (estimated) No. of Female Employees: 2306 (estimated)

[ 符号 ]:

GHS02, GHS05, GHS06

[ 信号词 ]:
Danger

[ 危害声明 ]:
H220-H280-H314-H331

[ 补充危害声明 ]:
Reacts violently with water.

[ 警示性声明 ]:
P210-P261-P280-P305 + P351 + P338-P310-P410 + P403

[ 个人防护装备 ]:
Faceshields;Gloves;Goggles;half-mask respirator (US);multi-purpose combination respirator cartridge (US)

[ 危害码 (欧洲) ]:
F+: Highly flammable;T: Toxic;

[ 风险声明 (欧洲) ]:
R12;R14;R23;R34

[ 安全声明 (欧洲) ]:
S26-S36/37/39-S45

[ 危险品运输编码 ]:
UN 2189 2.3

[ WGK德国 ]:
1

[ RTECS号 ]:
VV3050000

[ 危险类别 ]:
2.3

详细合成路线

二氯硅烷上游产品

二氯硅烷下游产品

【方法一】
将硅粉和氯化氢按适当比例进行反应，生成二氯二氢硅，经蒸馏分离三氯氢硅，把得到的二氯二氢硅进行精制，制得电子级高纯二氯二氢硅成品。其
Si+2HCl→SiH2C12

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